- 专利标题: Mask and manufacturing method thereof, fine metal mask, mask device and use method thereof
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申请号: US16959409申请日: 2019-11-29
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公开(公告)号: US11560615B2公开(公告)日: 2023-01-24
- 发明人: Peng Xu , Tong Niu , Fengli Ji , Jianpeng Wu , Guodong Zhang , Yu Zhao , Panting He , Sen Du
- 申请人: CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD. , BOE TECHNOLOGY GROUP CO., LTD.
- 申请人地址: CN Sichuan; CN Beijing
- 专利权人: CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.,BOE TECHNOLOGY GROUP CO., LTD.
- 当前专利权人: CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.,BOE TECHNOLOGY GROUP CO., LTD.
- 当前专利权人地址: CN Sichuan; CN Beijing
- 优先权: CN201910801463.0 20190828,CN201921410333.6 20190828
- 国际申请: PCT/CN2019/122085 WO 20191129
- 国际公布: WO2021/036067 WO 20210304
- 主分类号: C23C14/04
- IPC分类号: C23C14/04 ; B05C17/06 ; B05C21/00 ; H01L51/00 ; C23C14/24
摘要:
A mask, a manufacturing method thereof, a fine metal mask, a mask device and a use method thereof are provided. The mask includes at least one opening region and a shielding part surrounding and defining the at least one opening region. The shielding part includes a main part and at least one protrusion, in each opening region, the protrusion is protruded towards the opening region on a side of the main part facing the opening region; the main part includes an edge disposed on a side of the protrusion opposite to the opening region and with an extension direction being a same with an extension direction of the protrusion, the protrusion and a portion of the main part disposed between the edge and the protrusion includes a thinning portion with a thickness being less than a thickness of other portions of the shielding part.
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