- 专利标题: Catadioptric lens and optical system comprising such a lens
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申请号: US16544135申请日: 2019-08-19
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公开(公告)号: US11561381B2公开(公告)日: 2023-01-24
- 发明人: Konstantin Forcht , Dirk Doering
- 申请人: Carl Zeiss SMT GmbH
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT GmbH
- 当前专利权人: Carl Zeiss SMT GmbH
- 当前专利权人地址: DE Oberkochen
- 代理机构: Fish & Richardson P.C.
- 优先权: DE102017202802.5 20170221
- 主分类号: G02B17/08
- IPC分类号: G02B17/08 ; G02B5/08 ; G02B27/28 ; G02B5/30
摘要:
A catadioptric lens includes at least two optical elements arranged along an optical axis. Both optical elements are configured as a mirror having a substrate and a highly reflective coating applied to an interface of the substrate. The highly reflective coating extends from the interface of the substrate along a surface normal. At least one of the highly reflective coatings has one or a plurality of layers. The optical total layer thickness of the one layer of the plurality of layers increases radially from the inner area outward.
公开/授权文献
- US11520130B2 Catadioptric lens and optical system comprising such a lens 公开/授权日:2022-12-06
信息查询
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B17/00 | 有或无折射元件的具有反射面的系统 |
G02B17/08 | .折反射系统 |