Invention Grant
- Patent Title: Using a laser to adjust at least one of a stage and a head unit during manufacturing of a display device
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Application No.: US16929597Application Date: 2020-07-15
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Publication No.: US11563202B2Publication Date: 2023-01-24
- Inventor: Jongsung Kim , Honggi Min
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2020-0002143 20200107
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L51/56 ; H01L27/32 ; B05B12/08 ; H01L51/00 ; B05B12/00

Abstract:
An apparatus for manufacturing a display device includes: a stage configured to hold a substrate; a movement unit configured to move relative to the stage; a head unit arranged on the movement unit and including a nozzle for discharging a liquid droplet onto the substrate; and a sensor unit configured to emit a laser to irradiate the liquid droplet falling from the head unit to the substrate to sense a portion of a planar shape of the liquid droplet. The apparatus is configured to control the movement unit or the head unit based on the sensed portion of the planar shape.
Public/Granted literature
- US20210210734A1 APPARATUS FOR MANUFACTURING DISPLAY DEVICE AND METHOD OF MANUFACTURING THE DISPLAY DEVICE Public/Granted day:2021-07-08
Information query
IPC分类: