Invention Grant
- Patent Title: Electromechanical transducer and method for manufacturing same
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Application No.: US16980832Application Date: 2018-10-05
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Publication No.: US11563386B2Publication Date: 2023-01-24
- Inventor: Tomoo Ikeda , Izumi Yamamoto , Takuya Shirai , Yudai Hoshi
- Applicant: CITIZEN WATCH CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: CITIZEN WATCH CO., LTD.
- Current Assignee: CITIZEN WATCH CO., LTD.
- Current Assignee Address: JP Tokyo
- Priority: JPJP2018-051205 20180319
- International Application: PCT/JP2018/037475 WO 20181005
- International Announcement: WO2019/181026 WO 20190926
- Main IPC: H02N1/08
- IPC: H02N1/08 ; H02N1/00 ; B81B3/00

Abstract:
Provided are an electromechanical transducer including a light movable member that is easy to move and charged portions whose amount of electrostatic charge does not substantially change over time and a method for manufacturing such an electromechanical transducer. The electromechanical transducer using electrostatic interaction between a charged portion and a counter electrode to perform transduction between electric power and motive power includes a fixed substrate, a movable member being movable with a predetermined distance maintained between the fixed substrate and the movable member, the movable member having grooves in a surface facing the fixed substrate, the grooves being formed at intervals in a moving direction of the movable member, charged portions formed on the surface of the movable member so as to alternate with the grooves; counter electrodes disposed on a surface of the fixed substrate in the moving direction, the surface facing the movable member, and a cover layer containing copper and covering at least side walls of the movable member inside the grooves.
Public/Granted literature
- US20210367535A1 ELECTROMECHANICAL TRANSDUCER AND METHOD FOR MANUFACTURING SAME Public/Granted day:2021-11-25
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