公开(公告)号：US11563386B2

公开(公告)日：2023-01-24

申请号：US16980832

申请日：2018-10-05

Applicant: CITIZEN WATCH CO., LTD.

Inventor： Tomoo Ikeda ,  Izumi Yamamoto ,  Takuya Shirai ,  Yudai Hoshi

IPC: H02N1/08 ,  H02N1/00 ,  B81B3/00

Abstract: Provided are an electromechanical transducer including a light movable member that is easy to move and charged portions whose amount of electrostatic charge does not substantially change over time and a method for manufacturing such an electromechanical transducer. The electromechanical transducer using electrostatic interaction between a charged portion and a counter electrode to perform transduction between electric power and motive power includes a fixed substrate, a movable member being movable with a predetermined distance maintained between the fixed substrate and the movable member, the movable member having grooves in a surface facing the fixed substrate, the grooves being formed at intervals in a moving direction of the movable member, charged portions formed on the surface of the movable member so as to alternate with the grooves; counter electrodes disposed on a surface of the fixed substrate in the moving direction, the surface facing the movable member, and a cover layer containing copper and covering at least side walls of the movable member inside the grooves.

公开(公告)号：US11101748B2

公开(公告)日：2021-08-24

申请号：US16667895

申请日：2019-10-29

Applicant: CITIZEN WATCH CO., LTD.

Inventor： Toshinari Maeda ,  Makoto Watanabe ,  Yasuo Kitajima ,  Izumi Yamamoto

IPC: H02N1/08 ,  H02N1/00 ,  G04C10/00

Abstract: Provided is a method of manufacturing an electrostatic induction transducer, the method including: providing a conductive substrate; providing a first electret material film on a first surface of the conductive substrate; providing a second electret material film on a second surface of the conductive substrate; forming a through hole that penetrates the conductive substrate, the first electret material film, and the second electret material film; mounting a supported member being conductive to the conductive substrate while allowing the conductive substrate to move in an in-plane direction; and applying charges to the first electret material film and the second electret material film by a charging process.