Invention Grant
- Patent Title: Substrate transfer devices, systems and methods of use thereof
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Application No.: US16813191Application Date: 2020-03-09
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Publication No.: US11565402B2Publication Date: 2023-01-31
- Inventor: Alexander Berger , Jeffrey C Hudgens
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: B25J9/04
- IPC: B25J9/04 ; B25J9/12 ; B25J11/00 ; B25J9/00 ; B25J9/10

Abstract:
The disclosure describes devices, systems and methods relating to a transfer chamber for an electronic device processing system. For example, a robot can include a first mover configured to be driven by a platform of a linear motor, a support structure disposed on the first mover, a first robot arm attached to the first end of the support structure at a shoulder axis, and a first arm drive assembly. The first drive assembly can include a first pulley attached to a first end of the support structure and to the first robot arm at the shoulder axis, a second pulley attached to a second end of the support structure, a first band connecting the first pulley to the second pulley, and a second mover configured to be driven by the platform of the linear motor, where the second mover is connected to the first band, and where motion of the second mover relative to the first mover causes the first band to a) rotate the first pulley and the second pulley and b) rotate the first robot arm around the shoulder axis. Also disclosed are systems and methods incorporating the robot.
Public/Granted literature
- US20210276179A1 SUBSTRATE TRANSFER DEVICES, SYSTEMS AND METHODS OF USE THEREOF Public/Granted day:2021-09-09
Information query
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