公开(公告)号：US11759954B2

公开(公告)日：2023-09-19

申请号：US16860992

申请日：2020-04-28

Applicant: Applied Materials, Inc.

Inventor： Nicholas Michael Bergantz ,  Damon K. Cox ,  Alexander Berger

IPC: B25J9/16 ,  H01L21/677 ,  H01L21/67 ,  H01L21/687 ,  B65G47/90 ,  H01L21/68 ,  B25J11/00 ,  B25J13/08

CPC classification number: B25J9/1692 ,  B65G47/905 ,  H01L21/67167 ,  H01L21/67196 ,  H01L21/67259 ,  H01L21/67706 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/68 ,  H01L21/68707 ,  B25J9/1697 ,  B25J11/0095 ,  B25J13/08

Abstract: A calibration object is placed at a target orientation in a station of an electronics processing device by a first robot arm, and then retrieved from the station by the first robot arm. The calibration object is transferred to an aligner station using the first robot arm, a second robot arm and/or a load lock, wherein the calibration object has a first orientation at the aligner station. The first orientation at the aligner station is determined. A characteristic error value is determined based on the first orientation. The aligner station is to use the characteristic error value for alignment of objects to be placed in the first station.

公开(公告)号：US20210291374A1

公开(公告)日：2021-09-23

申请号：US16860992

申请日：2020-04-28

Applicant: Applied Materials, Inc.

Inventor： Nicholas Michael Bergantz ,  Damon K. Cox ,  Alexander Berger

IPC: B25J9/16 ,  B65G47/90

Abstract: A calibration object is placed at a target orientation in a station of an electronics processing device by a first robot arm, and then retrieved from the station by the first robot arm. The calibration object is transferred to an aligner station using the first robot arm, a second robot arm and/or a load lock, wherein the calibration object has a first orientation at the aligner station. The first orientation at the aligner station is determined. A characteristic error value is determined based on the first orientation. The aligner station is to use the characteristic error value for alignment of objects to be placed in the first station.

公开(公告)号：US20210276179A1

公开(公告)日：2021-09-09

申请号：US16813191

申请日：2020-03-09

Applicant: APPLIED MATERIALS, INC.

Inventor： Alexander Berger ,  Jeffrey C. Hudgens

IPC: B25J9/04 ,  B25J9/12 ,  B25J9/10 ,  B25J9/00 ,  B25J11/00

Abstract: The disclosure describes devices, systems and methods relating to a transfer chamber for an electronic device processing system. For example, a robot can include a first mover configured to be driven by a platform of a linear motor, a support structure disposed on the first mover, a first robot arm attached to the first end of the support structure at a shoulder axis, and a first arm drive assembly. The first drive assembly can include a first pulley attached to a first end of the support structure and to the first robot arm at the shoulder axis, a second pulley attached to a second end of the support structure, a first band connecting the first pulley to the second pulley, and a second mover configured to be driven by the platform of the linear motor, where the second mover is connected to the first band, and where motion of the second mover relative to the first mover causes the first band to a) rotate the first pulley and the second pulley and b) rotate the first robot arm around the shoulder axis. Also disclosed are systems and methods incorporating the robot.

公开(公告)号：US10755955B2

公开(公告)日：2020-08-25

申请号：US15894735

申请日：2018-02-12

Applicant: Applied Materials, Inc.

Inventor： Masato Ishii ,  Richard O. Collins ,  Richard Giljum ,  Alexander Berger

IPC: H01L21/677 ,  H01L21/687 ,  H01L21/673 ,  H01L21/68 ,  H01L21/67

Abstract: A substrate processing system is disclosed which includes a substrate input/output chamber coupled to a transfer chamber, and one or more processing chambers coupled to the transfer chamber, wherein the substrate input/output chamber includes a plurality of stacked carrier holders, and a platen, wherein the platen includes a plurality of alignment pads and a plurality of openings formed in a recessed flange along a peripheral edge of the platen.

公开(公告)号：US11565402B2

公开(公告)日：2023-01-31

申请号：US16813191

申请日：2020-03-09

Applicant: APPLIED MATERIALS, INC.

Inventor： Alexander Berger ,  Jeffrey C Hudgens

IPC: B25J9/04 ,  B25J9/12 ,  B25J11/00 ,  B25J9/00 ,  B25J9/10

Abstract: The disclosure describes devices, systems and methods relating to a transfer chamber for an electronic device processing system. For example, a robot can include a first mover configured to be driven by a platform of a linear motor, a support structure disposed on the first mover, a first robot arm attached to the first end of the support structure at a shoulder axis, and a first arm drive assembly. The first drive assembly can include a first pulley attached to a first end of the support structure and to the first robot arm at the shoulder axis, a second pulley attached to a second end of the support structure, a first band connecting the first pulley to the second pulley, and a second mover configured to be driven by the platform of the linear motor, where the second mover is connected to the first band, and where motion of the second mover relative to the first mover causes the first band to a) rotate the first pulley and the second pulley and b) rotate the first robot arm around the shoulder axis. Also disclosed are systems and methods incorporating the robot.

公开(公告)号：US12251830B2

公开(公告)日：2025-03-18

申请号：US18100522

申请日：2023-01-23

Applicant: APPLIED MATERIALS, INC.

Inventor： Alexander Berger ,  Jeffrey C. Hudgens

IPC: B25J9/04 ,  B25J9/00 ,  B25J9/10 ,  B25J9/12 ,  B25J11/00

Abstract: The disclosure describes devices, systems and methods relating to a transfer chamber for an electronic device processing system. For example, a method includes causing a robot arm to pick up a substrate. The robot arm is caused to pick up the substrate by causing a first mover to rotate or to change a first distance to a second mover. Rotation of the first mover or the change in the first distance causes the first robot arm to rotate about a shoulder axis. The robot arm is further caused to pick up the substrate by causing one of a) a second mover to rotate or b) a third mover to change a second distance to the second mover. Rotation of the second mover or the change in the second distance causes the robot arm to raise or lower.

公开(公告)号：US11766782B2

公开(公告)日：2023-09-26

申请号：US16861000

申请日：2020-04-28

Applicant: Applied Materials, Inc.

Inventor： Nicholas Michael Bergantz ,  Damon K. Cox ,  Alexander Berger

IPC: B25J9/16 ,  H01L21/67 ,  H01L21/677 ,  H01L21/687 ,  B65G47/90 ,  H01L21/68 ,  B25J11/00 ,  B25J13/08

CPC classification number: B25J9/1692 ,  B65G47/905 ,  H01L21/67167 ,  H01L21/67196 ,  H01L21/67259 ,  H01L21/67706 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/68 ,  H01L21/68707 ,  B25J9/1697 ,  B25J11/0095 ,  B25J13/08

Abstract: A first robot arm places a calibration object into a load lock that separates a factory interface from a transfer chamber using a first taught position. A second robot arm retrieves the calibration object from the load lock using a second taught position. A controller determines, using a sensor, a first offset amount between a calibration object center of the calibration object and a pocket center of the second robot arm. The controller determines a characteristic error value that represents a misalignment between the first taught position of the first robot arm and the second taught position of the second robot arm based on the first offset amount. The first robot arm or the second robot arm uses the first characteristic error value to compensate for the misalignment for objects transferred between the first robot arm and the second robot arm via the load lock.

公开(公告)号：US20220088803A1

公开(公告)日：2022-03-24

申请号：US17030094

申请日：2020-09-23

Applicant: Applied Materials, Inc.

Inventor： Alexander Berger ,  Paul Lawrence Korff ,  William Paul Laceky ,  Jeffrey C. Hudgens ,  Rajkumar Thanu ,  Damon K. Cox ,  Matvey Farber

IPC: B25J19/00 ,  B25J17/00 ,  B25J13/08 ,  B25J9/10 ,  H02K16/00 ,  H02K1/27 ,  H02K17/44

Abstract: A robot device includes a first link and a second link coupled to the first link via an elbow. One or more of the first link or the second link rotates about an axis of the elbow. The robot device further includes a generator disposed in the elbow. The generator is configured to generate electrical power based on relative angular mechanical movement associated with the elbow. The robot device further includes an end effector configured to transport a substrate within a substrate processing system. The end effector is disposed at a distal end of the second link. The end effector is to receive the electrical power generated by the generator.

公开(公告)号：US11232965B2

公开(公告)日：2022-01-25

申请号：US16591456

申请日：2019-10-02

Applicant: Applied Materials, Inc.

Inventor： Jacob Newman ,  Ulrich Oldendorf ,  Martin Aenis ,  Andrew J. Constant ,  Shay Assaf ,  Jeffrey C. Hudgens ,  Alexander Berger ,  William Tyler Weaver

IPC: H01L21/677 ,  B65G47/92 ,  H01L21/67 ,  H01L21/687

Abstract: Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.

公开(公告)号：US12115683B2

公开(公告)日：2024-10-15

申请号：US18355355

申请日：2023-07-19

Applicant: Applied Materials, Inc.

Inventor： Nicholas Michael Bergantz ,  Damon K. Cox ,  Alexander Berger

IPC: B25J9/16 ,  B65G47/90 ,  H01L21/67 ,  H01L21/677 ,  H01L21/68 ,  H01L21/687 ,  B25J11/00 ,  B25J13/08

CPC classification number: B25J9/1692 ,  B65G47/905 ,  H01L21/67167 ,  H01L21/67196 ,  H01L21/67259 ,  H01L21/67706 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/68 ,  H01L21/68707 ,  B25J9/1697 ,  B25J11/0095 ,  B25J13/08

Abstract: A first robot arm places a calibration object into a load lock that separates a factory interface from a transfer chamber using a first taught position. A second robot arm retrieves the calibration object from the load lock using a second taught position. A controller determines, using a sensor, a first offset amount between a calibration object center of the calibration object and a pocket center of the second robot arm. The controller determines a characteristic error value that represents a misalignment between the first taught position of the first robot arm and the second taught position of the second robot arm based on the first offset amount. The first robot arm or the second robot arm uses the first characteristic error value to compensate for the misalignment for objects transferred between the first robot arm and the second robot arm via the load lock.