Invention Grant
- Patent Title: Apparatus of charged-particle beam such as electron microscope comprising plasma generator, and method thereof
-
Application No.: US17644789Application Date: 2021-12-17
-
Publication No.: US11569059B2Publication Date: 2023-01-31
- Inventor: Zhongwei Chen , Xiaoming Chen , Daniel Tang , Liang-Fu Fan
- Applicant: Zhongwei Chen , Xiaoming Chen , Daniel Tang , Liang-Fu Fan
- Applicant Address: US CA Los Altos Hills; US CA Sunnyvale; US CA Fremont; US CA Fremont
- Assignee: Zhongwei Chen,Xiaoming Chen,Daniel Tang,Liang-Fu Fan
- Current Assignee: Zhongwei Chen,Xiaoming Chen,Daniel Tang,Liang-Fu Fan
- Current Assignee Address: US CA Los Altos Hills; US CA Sunnyvale; US CA Fremont; US CA Fremont
- Agency: Upstream Research and Patent LLC
- Agent George Guosheng Wang
- Main IPC: H01J37/26
- IPC: H01J37/26 ; B08B7/00 ; H01J37/244
Abstract:
The present invention provides an apparatus of charged-particle beam e.g. an electron microscope comprising an in-column plasma generator for selectively cleaning BSE detector and BF/DF detector. The plasma generator is located between a lower pole piece of objective lens and the BF/DF detectors, but outside trajectory area of the charged-particles from the sample stage to the BF/DF detector.
Public/Granted literature
Information query
