Invention Grant
- Patent Title: Corner structures for an optical fiber groove and manufacturing methods thereof
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Application No.: US17400847Application Date: 2021-08-12
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Publication No.: US11569180B2Publication Date: 2023-01-31
- Inventor: Nicholas A. Polomoff , Jae Kyu Cho , Mohamed A. Rabie , Andreas D. Stricker
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US NY Malta
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US NY Malta
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L31/02 ; H01L33/62 ; H01L23/00

Abstract:
Structures for an optical fiber groove and methods of forming a structure for an optical fiber groove. A photonics chip includes a substrate and an interconnect structure over the substrate. The photonics chip has a first exterior corner, a second exterior corner, and a side edge extending from the first exterior corner to the second exterior corner. The substrate includes a groove positioned along the side edge between the first exterior corner and the second exterior corner. The groove is arranged to intersect the side edge at a groove corner, and the interconnect structure includes metal structures adjacent to the first groove corner. The metal structures extend diagonally in the interconnect structure relative to the side edge of the photonics chip.
Public/Granted literature
- US20210375788A1 CORNER STRUCTURES FOR AN OPTICAL FIBER GROOVE Public/Granted day:2021-12-02
Information query
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