Invention Grant
- Patent Title: Vertical diamond MOSFET and method of making the same
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Application No.: US16851378Application Date: 2020-04-17
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Publication No.: US11569375B2Publication Date: 2023-01-31
- Inventor: Biqin Huang
- Applicant: HRL Laboratories, LLC
- Applicant Address: US CA Malibu
- Assignee: HRL Laboratories, LLC
- Current Assignee: HRL Laboratories, LLC
- Current Assignee Address: US CA Malibu
- Agency: Ladas & Parry, LLP
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L29/167 ; H01L29/16

Abstract:
A vertical field-effect transistor (FET), comprising a first doped region of a first material, said first doped region having a first doping and being formed on a surface of a substrate, a second doped region of said first material, said second doped region having a second doping and being formed on the first doped region, and a third doped region of said first material, said third doped region having a third doping and being formed on the second doped region, wherein the first doped region has a first width along a first direction parallel to said surface of the substrate, the second doped region has a second width along said first direction, the third doped region has a third width along said first direction, the second width being smaller than the first and third widths.
Public/Granted literature
- US20210328052A1 VERTICAL DIAMOND MOSFET AND METHOD OF MAKING THE SAME Public/Granted day:2021-10-21
Information query
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