Invention Grant
- Patent Title: Self-aligned ITO DBR based p-contact for small pitch micro-LED
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Application No.: US17177980Application Date: 2021-02-17
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Publication No.: US11569414B2Publication Date: 2023-01-31
- Inventor: Abdul Shakoor , Mohsin Aziz , Jun-Youn Kim
- Applicant: Meta Platforms Technologies, LLC
- Applicant Address: US CA Menlo Park
- Assignee: Meta Platforms Technologies, LLC
- Current Assignee: Meta Platforms Technologies, LLC
- Current Assignee Address: US CA Menlo Park
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: H01L33/10
- IPC: H01L33/10 ; H01L33/46 ; H01L27/15 ; H01L33/00 ; H01L33/38 ; H01L33/42 ; H01L33/60

Abstract:
A micro-light emitting diode includes a substrate including at least a first portion of an n-type semiconductor layer, and a mesa structure on the substrate and characterized by a linear lateral dimension equal to or less than about 3 μm. The mesa structure includes a plurality of epitaxial layers, and a conductive distributed Bragg reflector (DBR) on the plurality of epitaxial layers. The conductive DBR includes a plurality of transparent conductive oxide layers and covers between about 80% and about 100% of a full lateral area of the plurality of epitaxial layers. The micro-LED also includes a dielectric layer on sidewalls of the mesa structure, a reflective metal layer on sidewalls of the dielectric layer and electrically coupled to the first portion of the n-type semiconductor layer, and a first metal electrode in direct contact with the conductive DBR.
Public/Granted literature
- US20220262981A1 SELF-ALIGNED ITO DBR BASED P-CONTACT FOR SMALL PITCH MICRO-LED Public/Granted day:2022-08-18
Information query
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