- 专利标题: MEMS structure and method for detecting a change in a parameter
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申请号: US16406752申请日: 2019-05-08
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公开(公告)号: US11573131B2公开(公告)日: 2023-02-07
- 发明人: Reinhard Hainisch , Thomas Grille
- 申请人: Infineon Technologies AG
- 申请人地址: DE Neubiberg
- 专利权人: Infineon Technologies AG
- 当前专利权人: Infineon Technologies AG
- 当前专利权人地址: DE Neubiberg
- 代理机构: Banner & Witcoff Ltd.
- 优先权: DE102018207319.8 20180509
- 主分类号: B81B3/00
- IPC分类号: B81B3/00 ; G01K5/48 ; G01K5/54
摘要:
A MEMS structure including a latch, a first lever, and a second lever. The first lever is designed to move past the latch as a result of flexure in the event of a change in a parameter in a first direction, and to latch in place at the latch if a change in the parameter in a second direction different than the first direction subsequently takes place. The second lever is designed to move past the first lever as a result of flexure in the event of the change in the parameter in the second direction, and to latch in place at the first lever if a change in the parameter in the first direction takes place after the change in the parameter in the second direction.
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