Invention Grant
- Patent Title: Creation of stress in the channel of a nanosheet transistor
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Application No.: US17240002Application Date: 2021-04-26
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Publication No.: US11575003B2Publication Date: 2023-02-07
- Inventor: Nicolas Loubet , Tenko Yamashita , Guillaume Audoit , Nicolas Bernier , Remi Coquand , Shay Reboh
- Applicant: International Business Machines Corporation , COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: US NY Armonk; FR Paris
- Assignee: International Business Machines Corporation,COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: International Business Machines Corporation,COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: US NY Armonk; FR Paris
- Agency: Cantor Colburn LLP
- Agent Samuel Waldbaum
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/78 ; H01L29/417

Abstract:
Provided are embodiments for a semiconductor device. The semiconductor device includes a nanosheet stack comprising one or more layers, wherein the one or more layers are induced with strain from a modified sacrificial gate. The semiconductor device also includes one or more merged S/D regions formed on exposed portions of the nanosheet stack, wherein the one or more merged S/D regions fix the strain of the one or more layers, and a conductive gate formed over the nanosheet stack, wherein the conductive gate replaces a modified sacrificial gate without impacting the strain induced in the one or more layers. Also provided are embodiments for a method for creating stress in the channel of a nanosheet transistor.
Public/Granted literature
- US20210257450A1 CREATION OF STRESS IN THE CHANNEL OF A NANOSHEET TRANSISTOR Public/Granted day:2021-08-19
Information query
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