Invention Grant
- Patent Title: Accelerated training of a machine learning based model for semiconductor applications
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Application No.: US15394790Application Date: 2016-12-29
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Publication No.: US11580375B2Publication Date: 2023-02-14
- Inventor: Kris Bhaskar , Laurent Karsenti , Scott Young , Mohan Mahadevan , Jing Zhang , Brian Duffy , Li He , Huajun Ying , Hung Nien , Sankar Venkataraman
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- Main IPC: G06N3/08
- IPC: G06N3/08 ; G01Q30/02 ; G06N3/067 ; G06N20/00 ; G06N3/04 ; G06F30/20

Abstract:
Methods and systems for accelerated training of a machine learning based model for semiconductor applications are provided. One method for training a machine learning based model includes acquiring information for non-nominal instances of specimen(s) on which a process is performed. The machine learning based model is configured for performing simulation(s) for the specimens. The machine learning based model is trained with only information for nominal instances of additional specimen(s). The method also includes re-training the machine learning based model with the information for the non-nominal instances of the specimen(s) thereby performing transfer learning of the information for the non-nominal instances of the specimen(s) to the machine learning based model.
Public/Granted literature
- US20170193400A1 ACCELERATED TRAINING OF A MACHINE LEARNING BASED MODEL FOR SEMICONDUCTOR APPLICATIONS Public/Granted day:2017-07-06
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