Invention Grant
- Patent Title: Systems for integrating load locks into a factory interface footprint space
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Application No.: US17392392Application Date: 2021-08-03
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Publication No.: US11581203B2Publication Date: 2023-02-14
- Inventor: Jacob Newman , Andrew J. Constant , Michael R. Rice , Paul B. Reuter , Shay Assaf , Sushant S. Koshti
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B65G47/90 ; H01L21/677
Abstract:
The disclosure describes devices, systems, and methods for integrating load locks into a factory interface footprint space. A factory interface for an electronic device manufacturing system can include an interior volume defined by a bottom, a top and a plurality of sides, a first load lock disposed within the interior volume of the factory interface, and a first factory interface robot disposed within the interior volume of the factory interface, wherein the first factory interface robot is configured to transfer substrates between a first set of substrate carriers and the first load lock.
Public/Granted literature
- US20220068677A1 SYSTEMS AND METHODS FOR INTEGRATING LOAD LOCKS INTO A FACTORY INTERFACE FOOTPRINT SPACE Public/Granted day:2022-03-03
Information query
IPC分类:
