Invention Grant
- Patent Title: Memory array and method used in forming a memory array comprising strings of memory cells
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Application No.: US17091668Application Date: 2020-11-06
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Publication No.: US11581330B2Publication Date: 2023-02-14
- Inventor: John D. Hopkins , Jordan D. Greenlee , Nancy M. Lomeli , Alyssa N. Scarbrough
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11556 ; H01L27/11519 ; H01L27/1157 ; H01L27/11524 ; H01L27/11565

Abstract:
A memory array comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. Dummy pillars extend through the insulative tiers and the conductive tiers. A lowest of the conductive tiers comprises conducting material and dummy-region material that is aside and of different composition from that of the conducting material. The channel-material strings extend through the conducting material of the lowest conductive tier. The dummy pillars extend through the dummy-region material of the lowest conductive tier. Other embodiments, including method, are disclosed.
Public/Granted literature
- US20220149067A1 Memory Array And Method Used In Forming A Memory Array Comprising Strings Of Memory Cells Public/Granted day:2022-05-12
Information query
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