Invention Grant
- Patent Title: Method of manufacturing mask, mask manufactured by the same, and method of manufacturing display apparatus by using the same
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Application No.: US17025850Application Date: 2020-09-18
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Publication No.: US11584983B2Publication Date: 2023-02-21
- Inventor: Taesung Kim , Yunjong Yeo , Hyunmin Cho , Jihee Son , Sungsoon Im
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2020-0028585 20200306
- Main IPC: C23C14/04
- IPC: C23C14/04 ; H01L51/00 ; H01L27/32

Abstract:
A method of manufacturing a mask, includes forming an organic material layer on a mask substrate and patterning a hard mask on the organic material layer, etching the organic material layer to form a mask sheet including through holes, removing the hard mask on the mask sheet, forming a conductive material layer on the mask sheet, and etching the conductive material layer to form a conductive layer.
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