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公开(公告)号：US11773478B2
公开(公告)日：2023-10-03
申请号：US17307386
申请日：2021-05-04
发明人： Duckjung Lee , Ji-Hee Son , Sungsoon Im
CPC分类号： C23C14/042 , H10K71/00 , H10K71/166
摘要： A deposition mask includes a mask film including a polymer, a plurality of first deposition openings defined in the mask film. and a conductive layer which is on the mask film and receives a power. The conductive layer includes a first conductive pattern and a second conductive pattern spaced apart from each other along the mask film and electrically disconnected from each other. The conductive layer receives the power at the first conductive pattern and the second conductive pattern, and receipt of the power at the first conductive pattern and the second conductive pattern provides an electrostatic chuck function of the deposition mask.
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公开(公告)号：US11584983B2
公开(公告)日：2023-02-21
申请号：US17025850
申请日：2020-09-18
发明人： Taesung Kim , Yunjong Yeo , Hyunmin Cho , Jihee Son , Sungsoon Im
摘要： A method of manufacturing a mask, includes forming an organic material layer on a mask substrate and patterning a hard mask on the organic material layer, etching the organic material layer to form a mask sheet including through holes, removing the hard mask on the mask sheet, forming a conductive material layer on the mask sheet, and etching the conductive material layer to form a conductive layer.
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公开(公告)号：US20220359853A1
公开(公告)日：2022-11-10
申请号：US17737893
申请日：2022-05-05
发明人： Sungsoon Im , Jongkyu Kim , Seokho Moon , Jeonghyeon Park , Heemin Park , Seungyong Song , Duckjung Lee , Heonwoong Hwang
摘要： An apparatus for manufacturing a display device includes: a support to mount a display substrate having a pixel area; a multi-layered film disposed above the display substrate and including a light-transmissive base layer and a source layer disposed on the base layer facing the pixel area and including an organic material; and a laser device spaced apart from the multi-layered film to radiate a laser beam toward the multi-layered film. The source layer is capable of absorbing the laser beam.
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公开(公告)号：US20190027687A1
公开(公告)日：2019-01-24
申请号：US15865141
申请日：2018-01-08
发明人： Youngmin Moon , Sungsoon Im , Jeongkuk Kim , Minho Moon , Kyuhwan Hwang
IPC分类号： H01L51/00 , H01L27/32 , H01L51/56 , C25D1/20 , C25D1/10 , C23C16/04 , C23C14/04 , B23K26/50 , G03F7/16 , G03F7/20 , G03F7/26
摘要： A mask for thin film deposition of a display apparatus having both end portions coupleable to a frame in a state of tension in a lengthwise direction thereof, the mask including: a first portion having a first thickness and a plurality of pattern holes through which a deposition material may pass; a second portion comprising a welding portion having a second thickness configured to be coupled to a frame; and a third portion connecting the first portion and the third portion, wherein the first thickness is less than the second thickness, and the third portion includes an inclined surface connecting the first portion and the second portion.
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公开(公告)号：US09972810B2
公开(公告)日：2018-05-15
申请号：US15196055
申请日：2016-06-29
发明人： Youngmin Moon , Sungsoon Im , Kyuhwan Hwang , Minho Moon
IPC分类号： H01L21/00 , H01L51/56 , B23K26/382 , C25D1/10 , C25D1/20 , G03F7/20 , H01L51/00 , B23K101/36
CPC分类号： H01L51/56 , B23K26/382 , B23K2101/36 , C25D1/08 , C25D1/10 , C25D1/20 , C25D3/562 , G03F7/20 , H01L27/3244 , H01L51/0011 , H01L2227/323
摘要： A method of manufacturing a mask assembly includes forming, via an electroforming process, a base material including at least one opening on an electrode plate; and reprocessing the at least one opening using a laser to form at least one reprocessed opening.
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公开(公告)号：US11618941B2
公开(公告)日：2023-04-04
申请号：US17324029
申请日：2021-05-18
发明人： Youngmin Moon , Minho Moon , Seungyong Song , Sungsoon Im
摘要： A mask assembly includes a mask frame in which a first opening is defined, the mask frame including a front surface through which the first opening extends, and a deposition mask which is attached to the front surface of the mask frame and through which a plurality of second openings is defined. The mask frame includes an in which the front surface extends along a direction of gravity, the deposition mask includes an initial mask which is attached to the front surface of the mask frame in the thereof and through which the plurality of second openings is defined, and the of the mask frame having the front surface which extends along the direction of gravity disposes the first opening of the mask frame corresponding to all of the plurality of second openings of the initial mask along the direction of gravity.
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公开(公告)号：US11081645B2
公开(公告)日：2021-08-03
申请号：US16563619
申请日：2019-09-06
发明人： In-Bae Kim , Minho Moon , Youngho Park , Sungsoon Im
摘要： Provided is a mask assembly including a mask sheet including a pattern part with at least one opening part, and a welding part connected to the pattern part, and a mask frame with the mask sheet mounted thereon and welded to the welding part. The mask sheet includes a first surface configured to fact the mask frame and a second surface opposite to the first surface. The welding part includes a hatching area in which a surface roughness of the second surface is larger than that of the second surface in the pattern part.
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公开(公告)号：US20190177830A1
公开(公告)日：2019-06-13
申请号：US16169693
申请日：2018-10-24
发明人： In-bae Kim , Minho Moon , Sungsoon Im , Kyuhwan Hwang
摘要： A mask sheet and a method for manufacturing the same are provided. A mask sheet includes one or more openings defined therein, and an alloy of nickel and iron, and a particle of the alloy has a single crystalline structure. A method for manufacturing a mask sheet includes preparing a base sheet including an alloy of nickel and iron, performing a heat treatment on the entire base sheet; and forming one or more openings in the heat-treated base sheet.
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公开(公告)号：US09837608B2
公开(公告)日：2017-12-05
申请号：US15175640
申请日：2016-06-07
发明人： Youngmin Moon , Minho Moon , Sungsoon Im , Soonchul Chang , Kyuhwan Hwang
CPC分类号： H01L51/0011 , C23C14/042 , C23C14/24 , H01L27/3244 , H01L51/0023 , H01L51/5237 , H01L51/5256 , H01L51/56
摘要： A mask assembly includes: a mask frame; and a mask sheet disposed on the mask frame, wherein the mask sheet is stretched by applying tensile force and affixed onto the mask frame, wherein the mask sheet includes a pattern including a plurality of openings, and wherein a thickness of the pattern is different from thicknesses of other portions of the mask sheet.
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10.发明授权公开(公告)号：US09543519B2
公开(公告)日：2017-01-10
申请号：US14596653
申请日：2015-01-14
发明人： Sungsoon Im , Taewook Kang , Duckjung Lee
CPC分类号： H01L51/0013 , H01L27/3211 , H01L51/56 , H01L2227/323
摘要： Provided are a deposition apparatus and a method of manufacturing an organic light-emitting display (OLED) apparatus, which are capable of reducing manufacturing time and manufacturing costs of the OLED apparatus. The method includes: turning a substrate such that a deposition surface of the substrate faces upward; depositing a first deposition layer on a deposition surface of a first donor mask while the deposition surface of the first donor mask faces downward; arranging the first donor mask and the substrate such that the first donor mask is above the substrate while the first deposition layer faces downward and the deposition surface of the substrate faces upward; depositing, on the deposition surface of the substrate, a part of the first deposition layer of the deposition surface of the first donor mask; and turning the substrate such that the deposition surface of the substrate faces downward.
摘要翻译： 提供了能够减少OLED装置的制造时间和制造成本的有机发光显示（OLED）装置的制造装置和制造方法。 该方法包括：使基板转动使得基板的沉积表面朝向上方; 在第一供体掩模的沉积表面面向下时，将第一沉积层沉积在第一施主掩模的沉积表面上; 将第一施主掩模和衬底布置成使得第一施主掩模在衬底上方，同时第一沉积层面向下并且衬底的沉积表面朝上; 在所述衬底的沉积表面上沉积所述第一施主掩模的沉积表面的第一沉积层的一部分; 并转动基板使得基板的沉积表面朝下。
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