Invention Grant
- Patent Title: Laser chamber apparatus, gas laser apparatus, and method for manufacturing electronic device
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Application No.: US17372210Application Date: 2021-07-09
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Publication No.: US11588291B2Publication Date: 2023-02-21
- Inventor: Takuya Ishii , Takashi Ito , Ryota Kujira
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H01S3/038 ; H01S3/034 ; H01S3/225

Abstract:
A laser chamber apparatus may include a pipe, an inner electrode extending along a longitudinal direction of the pipe and disposed in a through hole in the pipe, an outer electrode including a contact plate extending along the longitudinal direction of the pipe and being in contact with an outer circumferential surface of the pipe and a ladder section formed of bar members each having one end connected to the contact plate and juxtaposed along a longitudinal direction of the contact plate, and a leaf spring extending along the longitudinal direction of the pipe and configured to press the outer electrode against the pipe. The leaf spring may include leaf spring pieces separated by slits, and the leaf spring pieces may each include a bent section bent along the edge and are configured to press the bar members in a position shifted from the bent sections toward the edge.
Public/Granted literature
- US20210336404A1 LASER CHAMBER APPARATUS, GAS LASER APPARATUS, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE Public/Granted day:2021-10-28
Information query
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