- 专利标题: Wire bonding method for semiconductor package
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申请号: US17199273申请日: 2021-03-11
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公开(公告)号: US11594503B2公开(公告)日: 2023-02-28
- 发明人: Hosoo Han , Yongje Lee
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Myers Bigel, P.A.
- 优先权: KR10-2020-0057817 20200514
- 主分类号: B23K20/00
- IPC分类号: B23K20/00 ; H01L23/00
摘要:
A wire bonding method includes bonding a tip of a wire provided through a clamp and a capillary onto a bonding pad of a chip, moving the capillary to a connection pad of a substrate corresponding to the bonding pad, bonding the wire to the connection pad to form a bonding wire connecting the bonding pad to the connection pad, before the capillary is raised from the connection pad, applying a electrical signal to the wire to detect whether the wire and the connection pad are in contact with each other, changing a state of the clamp to a closed state when the wire is not in contact with the connection pad and maintaining the state of the clamp in an open state when the wire is in contact with the connection pad, and raising the capillary from the connection pad while maintaining the state of the clamp.
公开/授权文献
- US20210358873A1 WIRE BONDING METHOD FOR SEMICONDUCTOR PACKAGE 公开/授权日:2021-11-18
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