Invention Grant
- Patent Title: Manufacturing method of display device
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Application No.: US17074947Application Date: 2020-10-20
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Publication No.: US11594561B2Publication Date: 2023-02-28
- Inventor: Yong-Hwan Ryu , Woo Jin Cho , Jong-Hyun Choung , Jae Uoon Kim , Sun-Jin Song , Hyun Duck Cho
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2020-0046071 20200416
- Main IPC: H01L27/12
- IPC: H01L27/12 ; G03F7/038 ; H01L21/027 ; G03F7/00 ; C23F1/00 ; C23C16/44

Abstract:
A method of manufacturing a display device in a chamber in which a material including yttrium is coated on an inner surface includes: forming a first layer pattern by dry etching on a substrate; depositing a second layer material on the first layer pattern; forming a photoresist pattern on the second layer material; completing a second layer pattern by using the photoresist pattern as an etch mask; and performing an additional acid etching process by using an etching solution including at least one of hydrochloric acid, sulfuric acid, or nitric acid before the forming of the photoresist pattern on the second layer material after the dry etching to form the first layer pattern.
Public/Granted literature
- US20210327927A1 MANUFACTURING METHOD OF DISPLAY DEVICE Public/Granted day:2021-10-21
Information query
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