Invention Grant
- Patent Title: Fluid control device and pump
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Application No.: US17115523Application Date: 2020-12-08
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Publication No.: US11598330B2Publication Date: 2023-03-07
- Inventor: Atsuhiko Hirata , Yukiharu Kodama
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Pearne & Gordon LLP
- Priority: JP2014-031372 20140221,JP2014-180355 20140904
- Main IPC: F04B43/04
- IPC: F04B43/04 ; F04B43/14 ; F04B45/047

Abstract:
A pump (1) includes a vibrating plate (15) that has a central part (21), a frame part (22), and connecting parts (23 to 26), a piezoelectric element (16) that is stacked over the central part (21) and configured to cause flexural vibrations to occur concentrically from the central part (21) to the connecting parts (23 to 26), and an opposed plate (13) that is stacked over the frame part (22) and positioned facing each of the connecting parts (23 to 26) with a spacing therebetween. The vibrating plate (15) has such a resonant mode that an antinode occurs in each of the central part (21) and the connecting parts (23 to 26). The opposed plate (13) has, at positions facing the connecting parts (23 to 26), a plurality of channel holes (39 to 43) through which a fluid flows.
Public/Granted literature
- US20210088041A1 FLUID CONTROL DEVICE AND PUMP Public/Granted day:2021-03-25
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