Invention Grant
- Patent Title: Imaging system and method for specimen detection
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Application No.: US17052900Application Date: 2018-09-03
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Publication No.: US11598732B2Publication Date: 2023-03-07
- Inventor: Wei He , Shuai Li
- Applicant: Focus-eBeam Technology (Beijing) Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: Focus-eBeam Technology (Beijing) Co., Ltd.
- Current Assignee: Focus-eBeam Technology (Beijing) Co., Ltd.
- Current Assignee Address: CN Beijing
- Agency: Syncoda LLC
- Agent Feng Ma
- Priority: CN201810837831.2 20180726,CN201821196445.1 20180726
- International Application: PCT/CN2018/103852 WO 20180903
- International Announcement: WO2020/019409 WO 20200130
- Main IPC: G01N23/046
- IPC: G01N23/046 ; G06T7/55 ; G01N23/2251 ; G06T7/70

Abstract:
An imaging system includes: a micro computed tomography (micro-CT) subsystem, a specimen processing subsystem, a scanning electron microscopy (SEM) and a processor. The micro-CT subsystem includes an X-ray source and an X-ray detector, and is configured to acquire a three-dimensional image of a specimen. The specimen processing subsystem includes a focused ion beam subsystem and a mechanical cutting device. The focused ion beam subsystem is configured to process the specimen in a first processing manner, and the mechanical cutting device is configured to process the specimen in a second processing manner to obtain a target section of a target area. The SEM is located above the specimen and is configured to acquire a two-dimensional image of the target section. The processor is configured to perform three-dimensional reconstruction on the two-dimensional images to obtain a three-dimensional imaging of the specimen.
Public/Granted literature
- US20210231589A1 IMAGING SYSTEM AND METHOD FOR SPECIMEN DETECTION Public/Granted day:2021-07-29
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