-
公开(公告)号：US20210110994A1
公开(公告)日：2021-04-15
申请号：US15779763
申请日：2018-05-02
Applicant: Focus-eBeam Technology (Beijing) Co., Ltd.
IPC: H01J37/28 , H01J37/145 , H01J37/244
Abstract: A scanning electron microscope objective lens system is disclosed, which includes: a magnetic lens, a deflection device, a deflection control electrode, specimen to be observed, and a detection device; in which, The opening of the pole piece of the magnetic lens faces to the specimen; the deflection device is located in the magnetic lens, which includes at least one sub-deflector; the deflection control electrode is located between the detection device and the specimen, and the deflection control electrode is used to change the direction of the primary electron beam and the signal electrons generating from the specimen; the detection device comprises the first sub-detector for detecting the back-scattered electrons and the second sub-detector for detecting the second electrons. A specimen detection method is also disclosed.
-
公开(公告)号：US20200234914A1
公开(公告)日：2020-07-23
申请号：US15757333
申请日：2018-02-07
Applicant: Focus-eBeam Technology (Beijing) Co., Ltd.
IPC: H01J37/28 , H01J37/244 , H01J37/145 , H01J37/147
Abstract: A low voltage scanning electron microscope is disclosed, which includes: an electron source configured to generate an electron beam; an electron beam accelerator configured to accelerate the electron beam; a compound objective lens configured to converge the electron beams accelerated by the electron beam accelerator; a deflection device arranged between the inner wall of the magnetic lens and the optical axis of the electron beam and configured to deflect the electron beam; a detection device comprising a first sub-detection device for receiving secondary and backscattered electrons from the specimen, a second sub-detection device for receiving backscattered electrons, and a control device for changing the trajectories of the secondary electrons and the backscattered electrons; an electrostatic lens comprising the second sub-detection device, a specimen stage, and a control electrode for reducing the moving speed of the electron beam and changing the moving directions of the secondary and the backscattered electrons.
-
公开(公告)号：US11598732B2
公开(公告)日：2023-03-07
申请号：US17052900
申请日：2018-09-03
Applicant: Focus-eBeam Technology (Beijing) Co., Ltd.
IPC: G01N23/046 , G06T7/55 , G01N23/2251 , G06T7/70
Abstract: An imaging system includes: a micro computed tomography (micro-CT) subsystem, a specimen processing subsystem, a scanning electron microscopy (SEM) and a processor. The micro-CT subsystem includes an X-ray source and an X-ray detector, and is configured to acquire a three-dimensional image of a specimen. The specimen processing subsystem includes a focused ion beam subsystem and a mechanical cutting device. The focused ion beam subsystem is configured to process the specimen in a first processing manner, and the mechanical cutting device is configured to process the specimen in a second processing manner to obtain a target section of a target area. The SEM is located above the specimen and is configured to acquire a two-dimensional image of the target section. The processor is configured to perform three-dimensional reconstruction on the two-dimensional images to obtain a three-dimensional imaging of the specimen.
-
公开(公告)号：US11508548B2
公开(公告)日：2022-11-22
申请号：US17288505
申请日：2020-09-21
Applicant: FOCUS-EBEAM TECHNOLOGY (BEIJING) CO., LTD.
IPC: H01J37/244 , H01J37/22 , H01J37/28
Abstract: A scanning electron microscope includes: an electron optical column, arranged to generate electron beams and focus the electron beams on a specimen; a first detector, arranged to receive electrons generated by the electron beams acting on the specimen; and a second detector, arranged to receive photons generated by the electron beams acting on the specimen. The second detector includes a reflector and a photon detector. The reflector is in a ring shape and is arranged to cover the perimeter of the specimen. The reflector reflects the photons generated on the specimen onto the photon detector. The scanning electron microscope provided by the present disclosure can collect photons in a wide range, and the photon detector has a high reception efficiency.
-
公开(公告)号：US10923312B2
公开(公告)日：2021-02-16
申请号：US15740291
申请日：2017-09-05
Applicant: Focus-eBeam Technology (Beijing) Co., Ltd.
IPC: H01J37/141 , H01J37/24 , H01J37/26
Abstract: A magnetic lens is disclosed, which includes: a magnetic yoke, an exciting coil and a power supply controlling system. The magnetic yoke is at outside of the exciting coil and surrounds the coil; the exciting coil is made up of litz wires; the power supply controlling system is arranged to supply power to the exciting coil and control the flow directions and magnitudes of the currents in the exciting coil. A method for controlling the magnetic lens is also disclosed.
-
Patent Agency Ranking
公开(公告)号：US11798781B2
公开(公告)日：2023-10-24
申请号：US17420707
申请日：2020-09-15
Applicant: FOCUS-EBEAM TECHNOLOGY (BEIJING) CO., LTD.
IPC: H01J37/285 , H01J37/20 , H01J37/28
CPC classification number: H01J37/285 , H01J37/20 , H01J37/28
Abstract: A microscope includes: an electronic optical column configured to emit scanning electron beams; a specimen stage configured to place a specimen; a target movably disposed between the electronic optical column and the specimen stage; and a driving mechanism for driving the target to move between a first position and a second position, wherein the first position is a position at which the electron beams act on the specimen, and the second position is a position at which the electron beams act on the target to generate X-rays irradiating the specimen. In the present disclosure, through one time mounting of the specimen, the microscope enables the dual-function detection of the specimen, i.e., detection of the specimen by an SEM and detection of the specimen by a Nano-CT.
-
公开(公告)号：US10699874B2
公开(公告)日：2020-06-30
申请号：US15741240
申请日：2017-03-02
Applicant: Focus-eBeam Technology (Beijing) Co., Ltd.
IPC: H01J37/28 , H01J37/26 , G01N23/2251
Abstract: A vacuum condition controlling apparatus, the top of which is connected with an electron beam generating instrument. The apparatus is rotationally symmetric, comprises the following parts deployed outward from the central axis: the central channel, the first pumping channel, the gas supplying chamber and the at least one pumping chamber. A pressure limiting aperture is deployed near the outlet of the central channel, for keeping the pressure difference between the central channel and the outside environment, and allow the electron beam to go through the central channel; the first pumping channel is connected to the central channel to pump the central channel; the top of the gas supplying chamber is connected to the gas supplying channel to supply gas to the area between the specimen and the apparatus; the top of the second pumping channel is connected to the second pumping channel, to pump the area.
-
公开(公告)号：US10903039B2
公开(公告)日：2021-01-26
申请号：US15740077
申请日：2017-09-05
Applicant: Focus-eBeam Technology (Beijing) Co., Ltd.
IPC: H01J37/20 , H01J37/09 , H01J37/244 , H01J37/28
Abstract: A vacuum condition processing apparatus is provided, the top of which is connected to an external charged particle beam generating device, and the apparatus includes: a suction cup in contact with the specimen to be observed or the stage holding the specimen, a first gas controlling device connected to an external gas supplying system, and a second gas controlling device connected to an external pumping system; a window is deployed at the top of the apparatus, through which the particle beam can go into the apparatus; the first gas controlling device is arranged to connect the gas supplying system and the suction cup; the second gas controlling device is arranged to connect the gas pumping system and the suction cup. Also disclosed is a specimen observation system and method.
-
公开(公告)号：US10777382B2
公开(公告)日：2020-09-15
申请号：US15757333
申请日：2018-02-07
Applicant: Focus-eBeam Technology (Beijing) Co., Ltd.
IPC: H01J37/28 , H01J37/244 , H01J37/145 , H01J37/147
Abstract: A low voltage scanning electron microscope is disclosed, which includes: an electron source configured to generate an electron beam; an electron beam accelerator configured to accelerate the electron beam; a compound objective lens configured to converge the electron beams accelerated by the electron beam accelerator; a deflection device arranged between the inner wall of the magnetic lens and the optical axis of the electron beam and configured to deflect the electron beam; a detection device comprising a first sub-detection device for receiving secondary and backscattered electrons from the specimen, a second sub-detection device for receiving backscattered electrons, and a control device for changing the trajectories of the secondary electrons and the backscattered electrons; an electrostatic lens comprising the second sub-detection device, a specimen stage, and a control electrode for reducing the moving speed of the electron beam and changing the moving directions of the secondary and the backscattered electrons.
-
公开(公告)号：US20190287760A1
公开(公告)日：2019-09-19
申请号：US15741246
申请日：2017-05-10
Applicant: Focus-eBeam Technology (Beijing) Co., Ltd.
IPC: H01J37/28 , H01J37/18 , H01J37/147 , H01J37/20 , H01J37/22 , G01N23/2251
Abstract: Disclosed is a charged particle beam system, which includes: a particle source, a column and a specimen chamber with a first movable vacuum window. The particle source is configured to generate a charged particle beam which impinges the specimen to be detected placed in a specimen chamber. The column includes a deflection device for deflecting the charged particle beam and a focusing device for focusing the charged particle beam. The charged particle beam system is compatible with multiple external optical systems to achieve simultaneous detection or fast-switching detection of the specimen. An opto-electro simultaneous detection system and the method are also disclosed.
-
-
-
-
-
-
-
-
-
Search Results
14
records
(took 0.029 seconds)
