A semiconductor structure includes a first metallization layer disposed on a first etch stop layer. The first metallization layer includes a first conductive line and a second conductive line, each disposed in a first dielectric layer and extending from the first etch stop layer. The height of the first conductive line is greater than a height of the second conductive line. The semiconductor structure further includes a first via layer comprising a second dielectric layer disposed on a top surface of the first metallization layer and a first via and a second via in the second dielectric layer. The semiconductor structure further includes a first conductive material disposed on a top surface of the first conductive line in the first via. The semiconductor structure further includes a second conductive material disposed on a top surface of the second conductive line in the second via.