- 专利标题: Method for forming chip package structure
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申请号: US17373016申请日: 2021-07-12
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公开(公告)号: US11600575B2公开(公告)日: 2023-03-07
- 发明人: Shin-Puu Jeng , Techi Wong , Po-Yao Lin , Ming-Chih Yew , Po-Hao Tsai , Po-Yao Chuang
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 主分类号: H01L23/538
- IPC分类号: H01L23/538 ; H01L23/00 ; H01L21/48 ; H01L25/00 ; H01L21/683 ; H01L25/10 ; H01L23/31 ; H01L21/768
摘要:
A method for forming a chip package structure is provided. The method includes forming a conductive pad over a carrier substrate. The method includes forming a substrate layer over the carrier substrate, wherein the conductive pad is embedded in the substrate layer, and the substrate layer includes fibers. The method includes forming a through hole in the substrate layer and exposing the conductive pad. The method includes forming a conductive pillar in the through hole. The method includes forming a recess in the substrate layer. The method includes disposing a chip in the recess. The method includes forming a molding layer in the recess. The method includes forming a redistribution structure over the substrate layer, the conductive pillar, the molding layer, and the chip. The method includes removing the carrier substrate.
公开/授权文献
- US20210343652A1 METHOD FOR FORMING CHIP PACKAGE STRUCTURE 公开/授权日:2021-11-04
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