Invention Grant
- Patent Title: Three-dimensional semiconductor memory devices and methods of fabricating the same
-
Application No.: US17136851Application Date: 2020-12-29
-
Publication No.: US11600638B2Publication Date: 2023-03-07
- Inventor: Sanghoon Lee , Sunggil Kim , Seulye Kim , Hwaeon Shin , Joonsuk Lee , Hyeeun Hong
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2018-0057878 20180521
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/1157 ; H01L21/02 ; H01L29/66 ; H01L21/3213 ; H01L21/768 ; H01L29/10 ; H01L27/11556 ; H01L27/11519 ; H01L27/11524 ; H01L27/11565 ; H01L21/28

Abstract:
Disclosed are three-dimensional semiconductor memory devices and methods of fabricating the same. The method comprises sequentially forming a sacrificial pattern and a source conductive layer on a substrate, forming a mold structure including a plurality of insulating layers and a plurality of sacrificial layers on the source conductive layer; forming a plurality of vertical structures penetrating the mold structure, forming a trench penetrating the mold structure, forming a sacrificial spacer on a sidewall of the trench, removing the sacrificial pattern to form a horizontal recess region; removing the sacrificial spacer, and forming a source conductive pattern filling the horizontal recess region.
Public/Granted literature
- US20210118907A1 THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICES AND METHODS OF FABRICATING THE SAME Public/Granted day:2021-04-22
Information query
IPC分类: