Invention Grant
- Patent Title: Avalanche photodiode device with a curved absorption region
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Application No.: US17373084Application Date: 2021-07-12
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Publication No.: US11600734B2Publication Date: 2023-03-07
- Inventor: Ashwyn Srinivasan , Maria Ioanna Pantouvaki , Joris Van Campenhout
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC VZW
- Current Assignee: IMEC VZW
- Current Assignee Address: BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: EP20185443 20200713
- Main IPC: H01L31/107
- IPC: H01L31/107 ; H01L31/028 ; H01L31/0352 ; H01L31/18

Abstract:
An avalanche photodiode (APD) device, in particular, a lateral separate absorption charge multiplication (SACM) APD device, and a method for its fabrication is provided. The APD device comprises a first contact region and a second contact region formed in a semiconductor layer. Further, the APD device comprises an absorption region formed on the semiconductor layer, wherein the absorption region is at least partly formed on a first region of the semiconductor layer, wherein the first region is arranged between the first contact region and the second contact region. The APD device further includes a charge region formed in the semiconductor layer between the first region and the second contact region, and an amplification region formed in the semiconductor layer between the charge region and the second contact region. At least the absorption region is curved on the semiconductor layer.
Public/Granted literature
- US20220013680A1 Avalanche Photodiode Device with a Curved Absorption Region Public/Granted day:2022-01-13
Information query
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