Invention Grant
- Patent Title: Ferroelectric resonator
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Application No.: US16238421Application Date: 2019-01-02
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Publication No.: US11605624B2Publication Date: 2023-03-14
- Inventor: Tanay Gosavi , Chia-ching Lin , Raseong Kim , Ashish Verma Penumatcha , Uygar Avci , Ian Young
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Essential Patents Group, LLP
- Main IPC: H01L27/02
- IPC: H01L27/02 ; H01L49/02

Abstract:
Describe is a resonator that uses ferroelectric (FE) material in a capacitive structure. The resonator includes a first plurality of metal lines extending in a first direction; an array of capacitors comprising ferroelectric material; a second plurality of metal lines extending in the first direction, wherein the array of capacitors is coupled between the first and second plurality of metal lines; and a circuitry to switch polarization of at least one capacitor of the array of capacitors. The switching of polarization regenerates acoustic waves. In some embodiments, the acoustic mode of the resonator is isolated using phononic gratings all around the resonator using metal lines above and adjacent to the FE based capacitors.
Public/Granted literature
- US20200212532A1 FERROELECTRIC RESONATOR Public/Granted day:2020-07-02
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