Invention Grant
- Patent Title: Method of forming patterned polyimide layer
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Application No.: US16909936Application Date: 2020-06-23
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Publication No.: US11609496B2Publication Date: 2023-03-21
- Inventor: Ting-Wei Chang , Ming-Che Chung
- Applicant: ECHEM SOLUTIONS CORP.
- Applicant Address: TW Taoyuan
- Assignee: ECHEM SOLUTIONS CORP.
- Current Assignee: ECHEM SOLUTIONS CORP.
- Current Assignee Address: TW Taoyuan
- Agency: Pai Patent & Trademark Law Firm
- Agent Chao-Chang David Pai
- Priority: TW107132323 20180913
- Main IPC: G03F7/039
- IPC: G03F7/039 ; G03F7/004 ; G03F7/16 ; G03F7/20 ; G03F7/42 ; G03F7/32 ; G03F7/38

Abstract:
The present invention provides a method for forming a patterned polyimide layer with the use of a positive photoresist composition. The composition comprises a cresol-type novolac resin, a diazonaphthoquinone-based sensitizer and an organic solvent; based on the cresol-type novolac resin with a total amount of 100 parts by weight, the amount of the diazonaphthoquinone-based sensitizer ranges from 40 parts to 60 parts by weight, the amount of the free cresol in the cresol-type novolac resin is lower than 2 parts by weight, and the alkaline dissolution rate (ADR) of the cresol-type novolac resin in an aqueous solution of 3.5 wt % to 7 wt % tetramethylammonium hydroxide is lower than 285 Å/s. The positive photoresist composition has excellent chemical resistance to the polyimide stripper, and can specifically improve the protective ability of the photoresist layer to the low-dielectric polyimide layer, thereby optimizing the manufacturing process and quality of the patterned polyimide layer.
Public/Granted literature
- US20200319554A1 METHOD OF FORMING PATTERNED POLYIMIDE LAYER Public/Granted day:2020-10-08
Information query
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