发明授权
- 专利标题: Dual arm robot
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申请号: US16990775申请日: 2020-08-11
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公开(公告)号: US11613002B2公开(公告)日: 2023-03-28
- 发明人: Robert T. Caveney , Alexander G. Krupyshev , Martin R. Elliot , Christopher Hofmeister
- 申请人: BROOKS AUTOMATION, INC.
- 申请人地址: US MA Chelmsford
- 专利权人: BROOKS AUTOMATION, INC.
- 当前专利权人: BROOKS AUTOMATION, INC.
- 当前专利权人地址: US MA Chelmsford
- 代理机构: Perman & Green, LLP
- 代理商 Colin C. Durham
- 主分类号: B25J9/04
- IPC分类号: B25J9/04
摘要:
A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.
公开/授权文献
- US20210023698A1 DUAL ARM ROBOT 公开/授权日:2021-01-28