Invention Grant
- Patent Title: Polishing method and polishing apparatus
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Application No.: US17072870Application Date: 2020-10-16
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Publication No.: US11618123B2Publication Date: 2023-04-04
- Inventor: Yu Ishii , Tetsuji Togawa , Atsushi Yoshida
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Priority: JPJP2019-194182 20191025
- Main IPC: B24B37/005
- IPC: B24B37/005 ; B24B49/16

Abstract:
A polishing method capable of accurately determining a polishing end point of a substrate is disclosed. The method comprises: rotating a polishing table supporting a polishing pad; and polishing the substrate by pressing the substrate against a polishing surface of the polishing pad by a polishing head, wherein polishing the substrate includes: an oscillation polishing process of polishing the substrate while causing the polishing head to oscillate along the polishing surface; and a static polishing process of polishing the substrate with the oscillation of the polishing head stopped, the static polishing process is performed after the oscillation polishing process, and the static polishing process comprises determining a static polishing end point which is a point in time at which a rate of change of torque for rotating the polishing table has reached a change-rate threshold value.
Public/Granted literature
- US20210170541A1 POLISHING METHOD AND POLISHING APPARATUS Public/Granted day:2021-06-10
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