- 专利标题: Polishing head retaining ring tilting moment control
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申请号: US17087941申请日: 2020-11-03
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公开(公告)号: US11623321B2公开(公告)日: 2023-04-11
- 发明人: Andrew Nagengast , Steven M. Zuniga , Jay Gurusamy
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patterson + Sheridan, LLP
- 主分类号: B24B37/32
- IPC分类号: B24B37/32 ; B24B49/16 ; B24B37/005 ; H01L21/306
摘要:
Embodiments of the present disclosure generally relate to chemical mechanical polishing (CMP) systems used in the manufacturing of semiconductor devices. In one embodiment, the apparatus includes a polishing module, a retaining ring, wherein the retaining ring includes a protrusion on a radially outward edge, and a plurality of load pins disposed through the retaining ring.
公开/授权文献
- US20220111483A1 POLISHING HEAD RETAINING RING TILTING MOMENT CONTROL 公开/授权日:2022-04-14
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