Invention Grant
- Patent Title: Integration of metasurface lens on wafer level substrate
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Application No.: US16356413Application Date: 2019-03-18
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Publication No.: US11626437B2Publication Date: 2023-04-11
- Inventor: Prashant Majhi , Kunjal Parikh , Jack T. Kavalieros
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L21/20 ; H01L21/768

Abstract:
Embodiments herein describe techniques for an optical device including a substrate of a wafer. An image sensor device is formed on a front side of the substrate, while a plurality of posts of a metasurface lens are formed on a backside opposite to the front side of the substrate. A post of the plurality of posts includes a metasurface material that is transparent to light. Other embodiments may be described and/or claimed.
Public/Granted literature
- US20200303442A1 INTEGRATION OF METASURFACE LENS ON WAFER LEVEL SUBSTRATE Public/Granted day:2020-09-24
Information query
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