- 专利标题: Light detecting device and method of manufacturing same
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申请号: US17173339申请日: 2021-02-11
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公开(公告)号: US11626529B2公开(公告)日: 2023-04-11
- 发明人: Changyoung Park , Sanghun Lee
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Sughrue Mion, PLLC
- 优先权: KR10-2020-0126375 20200928
- 主分类号: H01L31/103
- IPC分类号: H01L31/103 ; H01L31/0216 ; H01L31/18
摘要:
A light detecting device includes a light absorbing layer configured to absorb light in a wavelength range from visible light to short-wave infrared (SWIR); a first semiconductor layer provided on a first surface of the light absorbing layer; an anti-reflective layer provided on the first semiconductor layer and comprising a material having etch selectivity with respect to the first semiconductor layer; and a second semiconductor layer provided on a second surface of the light absorbing layer. The first semiconductor layer has a thickness less than 500 nm so as to be configured to allow light to transmit therethrough in the wavelength range from visible light to SWIR.
公开/授权文献
- US20220102573A1 LIGHT DETECTING DEVICE AND METHOD OF MANUFACTURING SAME 公开/授权日:2022-03-31
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