- Patent Title: Pressure sensor with improved detection accuracy and compact design
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Application No.: US17649832Application Date: 2022-02-03
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Publication No.: US11630012B2Publication Date: 2023-04-18
- Inventor: David Slogsnat , Joachim Kreutzer
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102021104607.6 20210226
- Main IPC: G01L9/00
- IPC: G01L9/00

Abstract:
A pressure sensor includes a micromechanical sensor element including a pressure-sensitive diaphragm, which spans a cavity in a base material and includes a diaphragm electrode. A fixed counter electrode is situated inside the cavity and, with the diaphragm electrode, forms a first measuring capacitor for detecting a first measuring pressure. A reference capacitor is situated inside the cavity and includes a first and a second fixed reference electrode. The pressure sensor is operable in a first operating mode, in which the first measuring capacitor and the first reference capacitor are interconnected in a first bridge circuit. The pressure sensor is operable in a second operating mode, in which the diaphragm electrode, the counter electrode and the reference electrodes are interconnected in such a way that the diaphragm electrode, together with the at least one first reference electrode, forms a second measuring capacitor for detecting a second measuring pressure.
Public/Granted literature
- US20220276108A1 PRESSURE SENSOR AND METHOD FOR OPERATING A PRESSURE SENSOR Public/Granted day:2022-09-01
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