Invention Grant
- Patent Title: Ion source with single-slot tubular cathode
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Application No.: US17407714Application Date: 2021-08-20
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Publication No.: US11631567B2Publication Date: 2023-04-18
- Inventor: Bon-Woong Koo , Frank Sinclair , Alexandre Likhanskii , Svetlana Radovanov , Alexander Perel , Graham Wright , Jay T. Scheuer , Daniel Tieger , You Chia Li , Jay Johnson , Tseh-Jen Hsieh , Ronald Johnson
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: KDW Firm PLLC
- Main IPC: H01J27/02
- IPC: H01J27/02 ; H01J37/317

Abstract:
An ion source including a chamber housing defining an ion source chamber and including an extraction plate on a front side thereof, the extraction plate having an extraction aperture formed therein, and a tubular cathode disposed within the ion source chamber and having an opening formed in a front half thereof nearest the extraction aperture, wherein a rear half of the tubular cathode furthest from the extraction aperture is closed.
Public/Granted literature
- US20210383995A1 ION SOURCE WITH SINGLE-SLOT TUBULAR CATHODE Public/Granted day:2021-12-09
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