Invention Grant
- Patent Title: Double control gate semi-floating gate transistor and method for preparing the same
-
Application No.: US17400657Application Date: 2021-08-12
-
Publication No.: US11637187B2Publication Date: 2023-04-25
- Inventor: Heng Liu , Zhigang Yang , Jianghua Leng , Tianpeng Guan
- Applicant: Shanghai Huali Integrated Circuit Corporation
- Applicant Address: CN Shanghai
- Assignee: Shanghai Huali Integrated Circuit Corporation
- Current Assignee: Shanghai Huali Integrated Circuit Corporation
- Current Assignee Address: CN Shanghai
- Agency: Banner & Witcoff, Ltd.
- Priority: CN202110115619.7 20210128
- Main IPC: H01L29/788
- IPC: H01L29/788 ; H01L29/423 ; H01L29/66

Abstract:
The present application provides a double control gate semi-floating gate transistor and a method for preparing the same. A lightly doped well region provided with a U-shaped groove is located on a substrate; one part of a floating gate oxide layer covers sidewalls and a bottom of the U-shaped groove, the other part covers the lightly doped well region on one side, and the floating gate oxide layer covering the lightly doped well region; a floating gate polysilicon layer is filled in the U-shaped groove and covers the floating gate oxide layer; a polysilicon control gate stack includes a polysilicon control gate oxide layer on the floating gate polysilicon layer and a polysilicon control gate polysilicon layer on the polysilicon control gate oxide layer; a metal control gate stack includes a high-K dielectric layer and a metal gate.
Public/Granted literature
- US20220238671A1 Double Control Gate Semi-Floating Gate Transistor and Method for Preparing the Same Public/Granted day:2022-07-28
Information query
IPC分类: