Invention Grant
- Patent Title: Acoustic wave device including Li2CO3 layer on piezoelectric substrate made of LiNbO3 or LiTaO3
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Application No.: US16928024Application Date: 2020-07-14
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Publication No.: US11637232B2Publication Date: 2023-04-25
- Inventor: Takashi Osawa , Masaki Tsutsumi , Masahiro Fukushima
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: Keating & Bennett, LLP
- Priority: JPJP2019-140698 20190731
- Main IPC: H01L41/187
- IPC: H01L41/187 ; H01L41/047 ; H01L41/09
Abstract:
An acoustic wave device includes a piezoelectric substrate made of LiNbO3 or LiTaO3 and including first and second main surfaces that face each other, a functional electrode provided on the first main surface of the piezoelectric substrate to excite acoustic waves, and a Li2CO3 layer provided on the second main surface of the piezoelectric substrate.
Public/Granted literature
- US20210036211A1 ACOUSTIC WAVE DEVICE Public/Granted day:2021-02-04
Information query
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