Invention Grant
- Patent Title: Methods for forming a layer comprising a condensing and a curing step
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Application No.: US17580832Application Date: 2022-01-21
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Publication No.: US11643726B2Publication Date: 2023-05-09
- Inventor: Marko Tuominen , Viljami Pore
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L. L.P.
- Main IPC: C23C16/458
- IPC: C23C16/458 ; C23C16/509 ; C23C16/517 ; C23C16/56 ; C23C16/52 ; C23C16/455
Abstract:
Methods for depositing materials are described. The methods comprise maintaining a substrate support at a substrate support temperature which is lower than a precursor source temperature. The methods further comprise condensing or depositing a precursor on a substrate, and then curing condensed or deposited precursor to form a layer.
Public/Granted literature
- US20220235460A1 METHODS AND SYSTEMS FOR DEPOSITING A LAYER Public/Granted day:2022-07-28
Information query
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