Invention Grant
- Patent Title: Method for calibrating an ultrasonic bonding machine
-
Application No.: US16527289Application Date: 2019-07-31
-
Publication No.: US11646291B2Publication Date: 2023-05-09
- Inventor: Florian Eacock , Michal Chajneta , Stefan Tophinke
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Murphy, Bilak & Homiller, PLLC
- Priority: EP 186443 2018.07.31
- Main IPC: H01L23/00
- IPC: H01L23/00 ; G05B19/18

Abstract:
A method for calibrating a second bonding machine based on a calibrated first bonding machine is disclosed. The first bonding machine includes a first ultrasonic transducer. The second bonding machine includes a second ultrasonic transducer and a power supply. The method includes providing a first electrical calibration supply that causes the first ultrasonic transducer to oscillate at a first calibration amplitude when it is damped by a mechanical damping, providing a second electrical calibration supply that causes the second ultrasonic transducer to oscillate at the same calibration amplitude when it is damped by the same mechanical damping. The second bonding machine is adapted to modify a second control signal based on a first electrical parameter of the first electrical calibration supply and on a second electrical parameter of the second electrical calibration supply in order to generate a modified second control signal, provide the modified second control signal to the power supply in order to cause the second power supply to generate a second electrical supply, and provide the second electrical supply to the second ultrasonic transducer.
Public/Granted literature
- US20200043883A1 Method for Calibrating an Ultrasonic Bonding Machine Public/Granted day:2020-02-06
Information query
IPC分类: