Invention Grant
- Patent Title: Laterally vibrating bulk acoustic wave resonator
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Application No.: US16505669Application Date: 2019-07-08
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Publication No.: US11646714B2Publication Date: 2023-05-09
- Inventor: Jeronimo Segovia Fernandez , Peter Smeys , Ting-Ta Yen
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Frank D. Cimino
- Main IPC: H03H9/17
- IPC: H03H9/17 ; H03H9/64 ; H03H9/02 ; H03H9/15 ; H03H9/05

Abstract:
A laterally vibrating bulk acoustic wave (LVBAW) resonator includes a piezoelectric plate sandwiched between first and second metal layers. The second metal layer is patterned into an interdigital transducer (IDT) with comb-shaped electrodes having interlocking fingers. The width and pitch of the fingers of the electrodes determine the resonant frequency. A combined thickness of the first and second metal layers and the piezoelectric layer is less than the pitch of the interlocking fingers.
Public/Granted literature
- US20200021272A1 Laterally Vibrating Bulk Acoustic Wave Resonator Public/Granted day:2020-01-16
Information query
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