- 专利标题: Laterally vibrating bulk acoustic wave resonator
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申请号: US16505669申请日: 2019-07-08
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公开(公告)号: US11646714B2公开(公告)日: 2023-05-09
- 发明人: Jeronimo Segovia Fernandez , Peter Smeys , Ting-Ta Yen
- 申请人: Texas Instruments Incorporated
- 申请人地址: US TX Dallas
- 专利权人: TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人: TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人地址: US TX Dallas
- 代理商 Frank D. Cimino
- 主分类号: H03H9/17
- IPC分类号: H03H9/17 ; H03H9/64 ; H03H9/02 ; H03H9/15 ; H03H9/05
摘要:
A laterally vibrating bulk acoustic wave (LVBAW) resonator includes a piezoelectric plate sandwiched between first and second metal layers. The second metal layer is patterned into an interdigital transducer (IDT) with comb-shaped electrodes having interlocking fingers. The width and pitch of the fingers of the electrodes determine the resonant frequency. A combined thickness of the first and second metal layers and the piezoelectric layer is less than the pitch of the interlocking fingers.
公开/授权文献
- US20200021272A1 Laterally Vibrating Bulk Acoustic Wave Resonator 公开/授权日:2020-01-16
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