Invention Grant
- Patent Title: Fabrication of phase change memory cell in integrated circuit
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Application No.: US17060295Application Date: 2020-10-01
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Publication No.: US11647681B2Publication Date: 2023-05-09
- Inventor: Baozhen Li , Chih-Chao Yang , Andrew Tae Kim , Barry Linder
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Kelsey M. Skodje
- The original application number of the division: US16299313 2019.03.12
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
A phase change memory (PCM) cell in an integrated circuit and a method of fabricating it involve depositing a layer of PCM material on a surface of a dielectric, and patterning the layer of PCM material into a plurality of PCM blocks. Heater material is formed on both sidewalls of each of the plurality of the PCM blocks to form a plurality of PCM cells. Each of the plurality of the PCM blocks and the heater material on both the sidewalls represents a PCM cell. An additional layer of the dielectric is deposited above and between the plurality of the PCM cells, and trenches are formed in the dielectric. Trenches are formed in contact with each side of each of the plurality of the PCM cells. Metal is deposited in each of the trenches. Current flow in the metal heats the heater material of one of the PCM cells.
Public/Granted literature
- US20210020836A1 FABRICATION OF PHASE CHANGE MEMORY CELL IN INTEGRATED CIRCUIT Public/Granted day:2021-01-21
Information query
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