Invention Grant
- Patent Title: Rosette piezo-resistive gauge circuit for thermally compensated measurement of full stress tensor
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Application No.: US17089421Application Date: 2020-11-04
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Publication No.: US11650110B2Publication Date: 2023-05-16
- Inventor: Zbynek Drasal , Jan Pekarek , Mikulas Jandak
- Applicant: Honeywell International Inc.
- Applicant Address: US NC Charlotte
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NC Charlotte
- Agency: Fogg & Powers LLC
- Main IPC: G01L5/162
- IPC: G01L5/162 ; B81B7/02 ; G01L1/18

Abstract:
Techniques relating to a micro-electro-mechanical (MEMS) device configured to measure direct axial and shear stress components of a stress tensor are described. The MEMS device includes a first and second circuit configured in a double rosette structure coupled with a third circuit in a standard rosette structure to form a triple rosette piezo-resistive gauge circuit. The first circuit includes at least one piezoresistive element suspended from a substrate, and at least one piezoresistive element fixed to the substrate. The second circuit includes each piezoresistive element fixed to the substrate. The third circuit includes at least one piezoresistive element fixed to the substrate. Additionally, the MEMS device may be coupled to one or more processing systems to determine a mechanical stress tensor that is applied to the MEMS device based on measurements received from the MEMS device.
Public/Granted literature
- US20220136913A1 ROSETTE PIEZO-RESISTIVE GAUGE CIRCUIT FOR THERMALLY COMPENSATED MEASUREMENT OF FULL STRESS TENSOR Public/Granted day:2022-05-05
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