Invention Grant
- Patent Title: Methods for forming memory devices
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Application No.: US17556674Application Date: 2021-12-20
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Publication No.: US11652004B2Publication Date: 2023-05-16
- Inventor: Yi-Tsung Tsai , Chia-Wei Wu , Chih-Hao Lin , Chien-Chih Li
- Applicant: Winbond Electronics Corp.
- Applicant Address: TW Taichung
- Assignee: WINBOND ELECTRONICS CORP.
- Current Assignee: WINBOND ELECTRONICS CORP.
- Current Assignee Address: TW Taichung
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- The original application number of the division: US16692186 2019.11.22
- Main IPC: H01L21/82
- IPC: H01L21/82 ; H01L21/8234 ; H01L21/3213 ; H01L21/02 ; H01L29/423 ; H01L21/8238 ; H01L29/66 ; H01L29/788

Abstract:
A memory device and a method for forming the same are provided. The method includes forming a plurality of gate structures on a substrate, forming a first spacer on opposite sides of the gate structures, filling a dielectric layer between adjacent first spacers, forming a metal silicide layer on the gate structures, conformally forming a spacer material layer over the metal silicide layer, the first spacer layer and the dielectric layer, and performing an etch back process on the spacer material layer to form a second spacer on opposite sides of the metal silicide layer.
Public/Granted literature
- US20220115518A1 MEMORY DEVICES AND METHODS FOR FORMING THE SAME Public/Granted day:2022-04-14
Information query
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