Invention Grant
- Patent Title: Lateral diffusion metal oxide semiconductor device and method for fabricating the same
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Application No.: US17314069Application Date: 2021-05-07
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Publication No.: US11652168B2Publication Date: 2023-05-16
- Inventor: Zong-Han Lin , Yi-Han Ye
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: CN 2110388841.4 2021.04.12
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/06 ; H01L29/40 ; H01L29/66

Abstract:
A method for fabricating a lateral diffusion metal oxide semiconductor (LDMOS) device includes the steps of first forming a first fin-shaped structure and a second fin-shaped structure on a substrate, forming a shallow trench isolation (STI) between the first fin-shaped structure and the second fin-shaped structure, forming a first gate structure on the first fin-shaped structure and a second gate structure on the second fin-shaped structure, forming a source region on the first fin-shaped structure, forming a drain region on the second fin-shaped structure, and forming a contact field plate directly on the STI.
Public/Granted literature
- US20220328684A1 LATERAL DIFFUSION METAL OXIDE SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2022-10-13
Information query
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