- 专利标题: Substrate-cleaning apparatus having tiltable roll brush
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申请号: US17081855申请日: 2020-10-27
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公开(公告)号: US11654458B2公开(公告)日: 2023-05-23
- 发明人: Yonghee Lee , Byoungho Kwon , Kuntack Lee
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Volentine, Whitt & Francos, PLLC
- 优先权: KR 20200060842 2020.05.21
- 主分类号: B08B1/00
- IPC分类号: B08B1/00 ; B08B13/00 ; B08B1/04 ; A46B13/00 ; A46B13/02 ; B08B3/04 ; B24B7/22 ; B24B37/04 ; B24B37/00 ; B24B7/00
摘要:
A substrate-cleaning apparatus may include a tilting arm to which a roll brush and a motor are coupled, a support arm positioned on the tilting arm, a first spring and a second spring coupling the tilting arm to the support arm, a first air bag and a second air bag mounted between the tilting arm and the support arm, and a controller configured to adjust an internal pressure of each of the first air bag and the second air bag. The controller may adjust a difference in internal pressure between the first air bag and the second air bag to control the inclination of the roll brush, and may adjust the internal pressure of each of the first air bag and the second air bag to move the roll brush vertically.
公开/授权文献
- US20210362198A1 SUBSTRATE-CLEANING APPARATUS HAVING TILTABLE ROLL BRUSH 公开/授权日:2021-11-25
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