Invention Grant
- Patent Title: Semiconductor memory device having spacer capping pattern disposed between burried dielectic pattern and an air gap and method of fabricating same
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Application No.: US17202465Application Date: 2021-03-16
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Publication No.: US11665883B2Publication Date: 2023-05-30
- Inventor: Inkyoung Heo , Hyo-Sub Kim , Sohyun Park , Taejin Park , Seung-Heon Lee , Youn-Seok Choi , Sunghee Han , Yoosang Hwang
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Volentine, Whitt & Francos, PLLC
- Priority: KR 20200032634 2020.03.17
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L23/532 ; H01L21/768 ; H01L23/482 ; H01L21/762

Abstract:
A semiconductor memory device includes; a first impurity region and a second impurity region spaced apart in a semiconductor substrate, a bit line electrically connected to the first impurity region, a storage node contact electrically connected to the second impurity region, an air gap between the bit line and the storage node contact, a landing pad electrically connected to the storage node contact, a buried dielectric pattern on a sidewall of the landing pad and on the air gap, and a spacer capping pattern between the buried dielectric pattern and the air gap.
Public/Granted literature
- US20210296321A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING SAME Public/Granted day:2021-09-23
Information query
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