- 专利标题: Vertical memory device having an insulator layer for improved yield
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申请号: US16794528申请日: 2020-02-19
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公开(公告)号: US11665906B2公开(公告)日: 2023-05-30
- 发明人: Tomoya Inden
- 申请人: Kioxia Corporation
- 申请人地址: JP Tokyo
- 专利权人: Kioxia Corporation
- 当前专利权人: Kioxia Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Kim & Stewart LLP
- 优先权: JP 2019155803 2019.08.28
- 主分类号: H01L27/1157
- IPC分类号: H01L27/1157 ; H01L27/11573 ; H01L27/11575 ; H01L27/11582 ; H01L27/11565
摘要:
A semiconductor memory device includes a substrate, a first conductor layer, and a first insulator layer. The substrate includes a first region on which memory cells are provided, a second region on which a control circuit of the memory cells is provided, and a third region separating the first region and the second region. The first conductor layer is above the second region of the substrate. The first insulator layer is above the second and third regions of the substrate. The first insulator layer includes a first portion that is above the first conductor layer and extends along a surface direction of the substrate, and a second portion that is continuous with the first portion and extends along a thickness direction of the substrate from the first portion toward a surface of the substrate in the third region.
公开/授权文献
- US20210066315A1 SEMICONDUCTOR MEMORY DEVICE 公开/授权日:2021-03-04
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