Device for analysis of cells and a method for manufacturing of a device
Abstract:
A device for analysis of cells comprises: an integrated circuit arrangement on a substrate; a dielectric layer formed above the integrated circuit arrangement; a microelectrode array layer formed above the dielectric layer, said microelectrode array layer comprising a plurality of individual electrodes, wherein each electrode is connected to the integrated circuit arrangement through a via in the dielectric layer; and wherein a plurality of longitudinal trenches in the dielectric layer and the microelectrode array layer are for stimulating cell growth on a surface of the device
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